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MFC (Mass Flow Controller)
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Brand Name : Neos MFC
Model : KAM-5 (Analogue Control MFC)
: KDM-5 (Digital Control MFC)
Full Scale : 10~5,000sccm (N2, Equivalent)
Control Range : 2~100% of F.S
Accuracy : 1% of Set point
Response time : 1.0sec.
Fitting type : 1/4VCR, 1/4SWL
RS commucation : RS232/485 available for only KDM-5
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